Tropel UltraSort

Tropel UltraSort

The next generation of automated wafer qualification

The Corning Tropel Ultra Sort represents the state-of-the-art in automated semiconductor wafer measurement, and continues a 25-year tradition of providing metrology solutions to semiconductor manufacturers. Designed specifically for high volume wafer manufacturing, this automated system offers the utmost in rapid, repeatable, accurate non-contact verification of many substrate materials in the field.

The Tropel UltraSort includes cassette-to-cassette handling with user configurable sorting capability. This Class 100-compliant system integrated a grazing incidence interferometer with industry standard robotic wafer handling. It can measure wafer sizes from two to eight inches wide, and is well suited for a wide variety of materials including gallium arsenide, sapphire, quartz, germanium, silicon, and much more.

Browse our Catalog to learn more about the Tropel UltraSort and other metrology instruments.

Accuracy50 nm  (2.0 u")
Repeatability15 nm  (0.6 u") 1 sigma
Resolution5 nm    (0.2 u")
Dynamic Range  (typical, limited by surface slope)> 100 um  (0.004")
Part Range 50 mm - 200 mm  (2" - 8")
Part Range Configuration 50 mm - 150 mm;  100 mm - 200 mm
Measured Data Points  ~ 230,000 per measurement
Measurement Time  ~ 5 seconds (typical)
Throughput = Clamped OR Unclamped  ~ 120 wafers per hour
Throughput = Clamped AND Unclamped  ~ 90 wafers per hour
Measurement Datums  Front referenced, back referenced, clamped, local site
Measurement Parameters Bow, Warp, SORI, TTV, LTV, LDOF, Thickness, Stress, and others. Contact us for a complete list.
Data Analysis 3-D, Contour plot, 2-D slice plots, Histogram, and others. Contact us for a complete list.
Surfaces Wire Sawn, ground, lapped, polished, etched